Browsing by Author 박진구

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Showing results 69 to 98 of 108

Issue DateTitleAuthor(s)
2015-04Mechanical deflection of a free-standing pellicle for extreme ultraviolet lithography박진구
2013-04Modification of Diamond Conditioner with V-SAM Coatings for Corrosion Prevention During Metal CMP박진구
2015-03Multi-Stack Extreme-Ultraviolet Pellicle with Out-of-Band Reduction박진구
2015-10Multistack structure for an extreme-ultraviolet pellicle with out-of-band radiation reduction박진구
2011-10Nano Gas Cluster Dry Cleaning for Damage Free Particle Removal박진구
2012-07Nanoscale Particle Removal Using Wet Laser Shockwave Cleaning박진구
2005-10Nanoscale Particles Removal on an Extreme Ultra-Violet Lithography(EUVL) Mask Layer by Lasershock Cleaning박진구
2013-01Non Destructive Nanoparticle Removal from Submicron Structures Using Megasonic Cleaning박진구
2015-01Novel one-step route to induce long-term lotus leaf-like hydrophobicity in polyester fabric박진구
2013-04On the mechanism of material removal by fixed abrasive lapping of various glass substrates박진구
2013-04Optimal Pressure and Temperature Conditions for Deposition of FOTS Thin Films Suitable for Anti-Stiction Layers박진구
2005-11Optimizing the Plasma Deposition Process Parameters of Antistiction Layers using a DOE(Design of Experiment)박진구
2005-07Particle Adhesion and Removal on EUV Mask Layers During Wet Cleaning박진구
2005-07Polishing Behavior and Characterization of Cu Surface in Citric Acid based Slurry with Corrosion Inhibitor(BTA)박진구
2019-01Post-CMP Cleaning of InGaAs Surface for the Removal of Nanoparticle Contaminants for Sub-10nm Device Applications박진구
2017-01Preparation of a high hydrophobic aluminium surface by double zincating process박진구
2015-10Prevention of Metal Contamination in Sub 50 nm SC1 Cleaning Process박진구
2013-08Quantitative Analysis of H5N1 DNA Hybridization on Nanowell Array Electrode박진구
2011-04Random yield loss during wafer cleaning박진구
2018-10Removal of EUV exposed hydrocarbon from Ru capping layer of EUV mask using the mixture of alkaline solutions and organic solvents박진구
2015-08Removal of Nano-sized Particles Using Carbon Dioxide (CO2) Gas Cluster Cleaning without Pattern Damage박진구
2013-01Removal of UV cured resin using hybrid cleaning method박진구
2014-01Removal of UV-cured resin using a hybrid cleaning process for nanoimprint lithography박진구
2013-01Removing W Polymer Residue from BEOL Structures using DSP+ (Dilute Sulfurec-Peroxide-HF) Mixture - A Case Study박진구
2013-01Role of mask patterns in fabrication of Si nanotip arrays박진구
2005-09Ruthenium CMP에서 Cerium Ammonium Nitrate와 알루미나 연마 입자가 연마 거동에 미치는 영향박진구
2019-02Selection and Optimization of Corrosion Inhibitors for Improved Cu CMP and Post-Cu CMP Cleaning박진구
2019-05Selection of CVD Diamond Crystal Size on a CVD Pad Conditioner for Improved Lifetime박진구
2017-01Self-assembled monolayer modified MoO3/Au/MoO3 multilayer anodes for high performance OLEDs박진구
2011-05A Self-Assembled Monolayer-Based Micropatterned Array for Controlling Cell Adhesion and Protein Adsorption박진구

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