Browsing by Author 박진구

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Showing results 43 to 72 of 107

Issue DateTitleAuthor(s)
2013-08Fabrication of 3D micro structure by dual diffuser lithography박진구
2012-03Fabrication of a hydrophobic/hydrophilic hybrid-patterned microarray chip and its application to a cancer marker immunoassay박진구
2005-11Fabrication of a Patterned Replica by Hot Embossing on Various Thicknesses of PMMA박진구
2018-04Fabrication of high performance copper-resin lapping plate for sapphire: A combined 2-body and 3-body diamond abrasive wear on sapphire박진구
2005-09Fabrication of Hot Embossing Plastic Stamps for Microstructure박진구
2016-06Fabrication of hydrophobic/hydrophilic switchable aluminum surface using poly(N-isopropylacrylamide)박진구
2012-01Fabrication of Large-Area CoNi Mold for Nanoimprint Lithography박진구
2005-06Fabrication of metal line on plastic substrate by hot embossing and CMP process박진구
2005-06Fabrication of plastic CE(capillary electrophoresis) microchip by hot embossing process박진구
2018-10Fabrication of Stainless Steel Metal Mask with Electrochemical Fabrication Method and Its Improvement in Dimensional Uniformity박진구
2013-04Fluorocarbon film-assisted fabrication of a CoNi mold with high aspect ratio for nanoimprint lithography박진구
2011-02Generation of Pad Debris during Oxide CMP Process and Its Role in Scratch Formation박진구
2013-05Hybrid Cleaning Technology for Enhanced Post-Cu/Low-Dielectric Constant Chemical Mechanical Planarization Cleaning Performance박진구
2011-07Hydrophobic Modification of Diamond Conditioner for Prevention of Particle Adhesion During Oxide CMP박진구
2013-11The impact of diamond conditioners on scratch formation during chemical mechanical planarization (CMP) of silicon dioxide박진구
2017-03Impact of non-uniform wrinkles for a multi-stack pellicle in EUV lithography박진구
2015-03Impact of the non-uniform intensity distribution caused by a meshed pellicle of extreme ultraviolet lithography박진구
2017-10Influence of a wrinkle in terms of critical dimension variation caused by transmission nonuniformity and a particle defect on extreme ultraviolet pellicle박진구
2012-07Influence of anionic polyelectrolyte addition on ceria dispersion behavior for quartz chemical mechanical polishing박진구
2016-09Influence of non-uniform intensity distribution of deformed pellicle for N7 patterning박진구
2016-05Investigation of cu-BTA complex formation during Cu chemical mechanical planarization process박진구
2015-02Investigation of oxide layer removal mechanism using reactive gases박진구
2013-05Investigation of Source-Based Scratch Formation During Oxide Chemical Mechanical Planarization박진구
2015-02Large-Scale Plasma Patterning of Transparent Graphene Electrode on Flexible Substrates박진구
2005-07Laser Shock Removal of Nanoparticles from Si Capping Layer of Extreme Ultraviolet Lithography Masks박진구
2015-04Mechanical deflection of a free-standing pellicle for extreme ultraviolet lithography박진구
2013-04Modification of Diamond Conditioner with V-SAM Coatings for Corrosion Prevention During Metal CMP박진구
2015-03Multi-Stack Extreme-Ultraviolet Pellicle with Out-of-Band Reduction박진구
2015-10Multistack structure for an extreme-ultraviolet pellicle with out-of-band radiation reduction박진구
2011-10Nano Gas Cluster Dry Cleaning for Damage Free Particle Removal박진구